Imec Acquires Advanced ASML EUV Scanner to Boost Europe’s Semiconductor Manufacturing

• March 20, 2026

Belgium’s Imec research center has expanded its semiconductor manufacturing capabilities with the recent installation of ASML’s latest extreme ultraviolet (EUV) lithography scanner, the TWINSCAN EXE:5200. This cutting-edge equipment features a high numerical aperture (NA) of 0.55, enabling it to achieve unparalleled resolution levels in the production of semiconductor circuits.

Enhancing Europe’s Chipmaking Edge

With the TWINSCAN EXE:5200, Imec is poised to maintain Europe’s competitive position in the semiconductor industry by facilitating next-generation process technologies. The improved resolution provided by the high-NA scanner supports the fabrication of finer and more complex chip structures, meeting increasing demands from semiconductor manufacturers striving for greater performance and efficiency.

The acquisition reflects ongoing investment in research infrastructure aimed at sustaining and advancing Europe’s role as a key contributor to innovative chip process technologies. This move offers chipmakers access to advanced lithography tools necessary for developing future semiconductor nodes, aligning with industry trends toward ever-smaller transistor sizes.

By integrating ASML’s latest EUV technology, Imec strengthens its capability to support both fundamental research and practical applications within the semiconductor ecosystem. The institute’s enhanced facilities are expected to attract notable interest from companies requiring sophisticated lithography solutions, fostering collaborations that drive semiconductor process evolution.

Although specific details regarding deployment timelines and project scopes were not disclosed, the addition of the TWINSCAN EXE:5200 marks a critical development in Europe’s continuous commitment to semiconductor innovation. The advanced scanner complements existing initiatives aimed at securing long-term technological leadership in chip manufacturing.

Belgian research institute Imec installs ASML’s newest EUV scanner, advancing Europe’s semiconductor manufacturing with high-resolution chipmaking technology.