China Begins Mass Production of Domestic DUV Lithography Machines for 7nm Chip Manufacturing

• July 27, 2026

China has recently achieved a significant milestone in semiconductor manufacturing by beginning the mass production of domestically developed deep ultraviolet (DUV) lithography machines that utilize immersion technology. This development marks a crucial step forward in the country’s efforts to produce advanced 7-nanometer (nm) chips independently.

Domestic DUV Lithography Systems Set to Ship This Year

The initial batch of these new lithography units is scheduled to be delivered before the end of the year, signaling a move toward reducing reliance on foreign semiconductor equipment. These machines are designed to support the fabrication of 7nm chips, which play a key role in modern computing devices, offering enhanced performance and energy efficiency.

The production facility responsible for manufacturing these DUV lithography systems is operated by a state-owned company based in Shanghai. While the company’s name has not been publicly disclosed, the operation represents a coordinated effort by China’s government-backed semiconductor sector to enhance domestic production capabilities.

Among the anticipated early users of these machines are several prominent Chinese semiconductor firms, including SMIC and Hua Hong Semiconductor, which are notable chipmakers within the country. Additionally, ChangXin Memory Technologies, a manufacturer specializing in memory products, is expected to be among the first recipients of the new DUV devices.

DUV lithography with immersion technology remains a critical technology in semiconductor fabrication, enabling finer patterning on silicon wafers compared to earlier lithography techniques. Although extreme ultraviolet (EUV) lithography machines represent the cutting edge for producing smaller nodes, DUV systems continue to be essential for a broad range of advanced semiconductor processes.

The Information reported this development based on insights from two sources familiar with the situation, highlighting the strategic importance of this capability for China’s semiconductor ambitions. The domestic availability of these systems is expected to help mitigate challenges from international supply restrictions and boost the local semiconductor manufacturing ecosystem.

As the global tech industry increasingly prioritizes supply chain security and technological sovereignty, China’s push to domestically produce critical semiconductor equipment aligns with broader national strategies to advance its semiconductor self-sufficiency. It remains to be seen how this move will impact global chip manufacturing dynamics in the coming years.

China has started large-scale manufacturing of its own deep ultraviolet lithography systems, with initial deliveries expected this year.